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	hartrees
Energy at 0K	-390.535985
Energy at 298.15K
HF Energy	-390.165828
Nuclear repulsion energy	63.110411

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2303	2182	29.72
2	A₁	1029	975	220.99
3	A₁	896	849	39.96
4	E	2307	2186	132.27
5	E	2307	2186	132.27
6	E	992	940	91.63
7	E	992	940	91.63
8	E	744	705	59.38
9	E	744	705	59.38

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.500
F2	0.000	0.000	-1.101
H3	0.000	1.398	0.971
H4	-1.210	-0.699	0.971
H5	1.210	-0.699	0.971

	Si1	F2	H3	H4	H5
Si1		1.6002	1.4749	1.4749	1.4749
F2	1.6002		2.4990	2.4990	2.4990
H3	1.4749	2.4990		2.4206	2.4206
H4	1.4749	2.4990	2.4206		2.4206
H5	1.4749	2.4990	2.4206	2.4206

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.643	F2	Si1	H4	108.643
F2	Si1	H5	108.643	H3	Si1	H4	110.287
H3	Si1	H5	110.287	H4	Si1	H5	110.287

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: QCISD/6-31G(2df,p)

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: QCISD/6-31G(2df,p)

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)