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	hartrees
Energy at 0K	-584.875840
Energy at 298.15K
HF Energy	-584.875840
Nuclear repulsion energy	185.716331

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)	Raman Act (Å⁴/u)	Dep P	Dep U
1	A₁	2555	2314	121.48	78.37	0.18	0.30
2	A₁	922	835	83.41	4.82	0.00	0.00
3	A₁	430	390	128.14	1.07	0.75	0.86
4	E	1119	1013	267.49	1.05	0.75	0.86
4	E	1119	1013	267.49	1.05	0.75	0.86
5	E	946	857	62.55	15.68	0.75	0.86
5	E	946	857	62.55	15.68	0.75	0.86
6	E	315	285	23.53	0.67	0.75	0.86
6	E	315	285	23.53	0.67	0.75	0.86

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.352
H2	0.000	0.000	1.798
F3	0.000	1.484	-0.249
F4	1.285	-0.742	-0.249
F5	-1.285	-0.742	-0.249

	Si1	H2	F3	F4	F5
Si1		1.4456	1.6014	1.6014	1.6014
H2	1.4456		2.5286	2.5286	2.5286
F3	1.6014	2.5286		2.5703	2.5703
F4	1.6014	2.5286	2.5703		2.5703
F5	1.6014	2.5286	2.5703	2.5703

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
H2	Si1	F3	112.074	H2	Si1	F4	112.074
H2	Si1	F5	112.074	F3	Si1	F4	106.747
F3	Si1	F5	106.747	F4	Si1	F5	106.747

All results from a given calculation for SiHF₃ (trifluorosilane)

using model chemistry: HF/3-21G

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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Number	Element	Mulliken
1	Si	1.826
2	H	-0.262
3	F	-0.521
4	F	-0.521
5	F	-0.521

	x	y	z	Total
	0.000	0.000	2.451	2.451
CHELPG
AIM
ESP

<r²>	84.314
(<r²>)^1/2	9.182

All results from a given calculation for SiHF3 (trifluorosilane)

using model chemistry: HF/3-21G

States and conformations

All results from a given calculation for SiHF₃ (trifluorosilane)