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	hartrees
Energy at 0K	-388.253674
Energy at 298.15K
HF Energy	-388.073581
Nuclear repulsion energy	61.469568

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2246	2093	42.82
2	A₁	1085	1011	296.86
3	A₁	906	844	11.66
4	E	2242	2089	166.39
5	E	2242	2089	166.39
6	E	923	860	113.70
7	E	923	860	113.70
8	E	777	724	103.34
9	E	777	724	103.34

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.514
F2	0.000	0.000	-1.137
H3	0.000	1.408	1.013
H4	-1.220	-0.704	1.013
H5	1.220	-0.704	1.013

	Si1	F2	H3	H4	H5
Si1		1.6511	1.4939	1.4939	1.4939
F2	1.6511		2.5699	2.5699	2.5699
H3	1.4939	2.5699		2.4392	2.4392
H4	1.4939	2.5699	2.4392		2.4392
H5	1.4939	2.5699	2.4392	2.4392

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	109.495	F2	Si1	H4	109.495
F2	Si1	H5	109.495	H3	Si1	H4	109.448
H3	Si1	H5	109.448	H4	Si1	H5	109.448

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: CID/3-21G

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: CID/3-21G

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)