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	hartrees
Energy at 0K	-388.255623
Energy at 298.15K
HF Energy	-388.073519
Nuclear repulsion energy	61.416600

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2242	2111	43.35
2	A₁	1085	1021	293.86
3	A₁	901	848	11.47
4	E	2237	2106	168.51
5	E	2237	2106	168.51
6	E	921	867	114.05
7	E	921	867	114.05
8	E	776	730	101.80
9	E	776	730	101.80

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.515
F2	0.000	0.000	-1.138
H3	0.000	1.409	1.014
H4	-1.220	-0.704	1.014
H5	1.220	-0.704	1.014

	Si1	F2	H3	H4	H5
Si1		1.6529	1.4944	1.4944	1.4944
F2	1.6529		2.5721	2.5721	2.5721
H3	1.4944	2.5721		2.4397	2.4397
H4	1.4944	2.5721	2.4397		2.4397
H5	1.4944	2.5721	2.4397	2.4397

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	109.515	F2	Si1	H4	109.515
F2	Si1	H5	109.515	H3	Si1	H4	109.427
H3	Si1	H5	109.427	H4	Si1	H5	109.427

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: CISD/3-21G

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: CISD/3-21G

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)