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	hartrees
Energy at 0K	-386.250545
Energy at 298.15K
HF Energy	-386.250545
Nuclear repulsion energy	61.625961

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)	Raman Act (Å⁴/u)	Dep P	Dep U
1	A₁	2510	2322	27.82	73.49	0.03	0.06
2	A₁	1097	1015	206.13	9.65	0.70	0.82
3	A₁	858	794	2.88	3.60	0.42	0.59
4	E	2556	2365	56.86	39.66	0.75	0.86
4	E	2556	2365	56.86	39.66	0.75	0.86
5	E	1069	989	66.04	20.77	0.75	0.86
5	E	1069	989	66.03	20.77	0.75	0.86
6	E	736	680	63.63	6.36	0.75	0.86
6	E	736	680	63.63	6.36	0.75	0.86

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.516
F2	0.000	0.000	-1.143
H3	0.000	1.372	1.021
H4	-1.188	-0.686	1.021
H5	1.188	-0.686	1.021

	Si1	F2	H3	H4	H5
Si1		1.6592	1.4624	1.4624	1.4624
F2	1.6592		2.5628	2.5628	2.5628
H3	1.4624	2.5628		2.3770	2.3770
H4	1.4624	2.5628	2.3770		2.3770
H5	1.4624	2.5628	2.3770	2.3770

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	110.210	F2	Si1	H4	110.210
F2	Si1	H5	110.210	H3	Si1	H4	108.723
H3	Si1	H5	108.723	H4	Si1	H5	108.723

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: BLYP/STO-3G

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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Number	Element	Mulliken
1	Si	0.623
2	F	-0.207
3	H	-0.138
4	H	-0.138
5	H	-0.138

	x	y	z	Total
	0.000	0.000	0.352	0.352
CHELPG
AIM
ESP

<r²>	35.482
(<r²>)^1/2	5.957

All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: BLYP/STO-3G

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)