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	hartrees
Energy at 0K	-386.321609
Energy at 298.15K
HF Energy	-386.321609
Nuclear repulsion energy	62.165723

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)	Raman Act (Å⁴/u)	Dep P	Dep U
1	A₁	2644	2323	17.05	66.98	0.04	0.08
2	A₁	1128	992	205.18	8.95	0.70	0.82
3	A₁	888	781	3.30	3.54	0.41	0.58
4	E	2693	2367	36.40	36.90	0.75	0.86
4	E	2693	2367	36.40	36.90	0.75	0.86
5	E	1113	979	67.10	21.38	0.75	0.86
5	E	1113	979	67.11	21.38	0.75	0.86
6	E	772	678	69.12	6.23	0.75	0.86
6	E	772	678	69.12	6.23	0.75	0.86

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.513
F2	0.000	0.000	-1.133
H3	0.000	1.361	1.006
H4	-1.179	-0.680	1.006
H5	1.179	-0.680	1.006

	Si1	F2	H3	H4	H5
Si1		1.6464	1.4472	1.4472	1.4472
F2	1.6464		2.5350	2.5350	2.5350
H3	1.4472	2.5350		2.3571	2.3571
H4	1.4472	2.5350	2.3571		2.3571
H5	1.4472	2.5350	2.3571	2.3571

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	109.892	F2	Si1	H4	109.892
F2	Si1	H5	109.892	H3	Si1	H4	109.047
H3	Si1	H5	109.047	H4	Si1	H5	109.047

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: mPW1PW91/STO-3G

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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Number	Element	Mulliken
1	Si	0.633
2	F	-0.243
3	H	-0.130
4	H	-0.130
5	H	-0.130

	x	y	z	Total
	0.000	0.000	0.646	0.646
CHELPG
AIM
ESP

<r²>	34.985
(<r²>)^1/2	5.915

All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: mPW1PW91/STO-3G

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)