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	hartrees
Energy at 0K	-386.333409
Energy at 298.15K
HF Energy	-386.333409
Nuclear repulsion energy	62.398430

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)	Raman Act (Å⁴/u)	Dep P	Dep U
1	A₁	2670	2670	12.38	77.09	0.04	0.08
2	A₁	1140	1140	224.22	9.27	0.69	0.81
3	A₁	920	920	1.64	3.67	0.42	0.59
4	E	2717	2717	26.43	43.16	0.75	0.86
4	E	2717	2717	26.20	43.26	0.75	0.86
5	E	1126	1126	74.81	22.87	0.75	0.86
5	E	1126	1126	74.74	22.83	0.75	0.86
6	E	779	779	76.92	6.53	0.75	0.86
6	E	779	779	76.90	6.48	0.75	0.86

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.513
F2	0.000	0.000	-1.130
H3	0.000	1.352	0.998
H4	-1.171	-0.676	0.998
H5	1.171	-0.676	0.998

	Si1	F2	H3	H4	H5
Si1		1.6430	1.4365	1.4365	1.4365
F2	1.6430		2.5217	2.5217	2.5217
H3	1.4365	2.5217		2.3415	2.3415
H4	1.4365	2.5217	2.3415		2.3415
H5	1.4365	2.5217	2.3415	2.3415

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	109.766	F2	Si1	H4	109.766
F2	Si1	H5	109.766	H3	Si1	H4	109.175
H3	Si1	H5	109.175	H4	Si1	H5	109.175

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: M06-2X/STO-3G

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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Number	Element	Mulliken
1	Si	0.671
2	F	-0.245
3	H	-0.142
4	H	-0.142
5	H	-0.142

	x	y	z	Total
	0.000	0.000	0.645	0.645
CHELPG
AIM
ESP

	x	y	z
x	1.437	0.000	0.000
y	0.000	1.440	0.001
z	0.000	0.001	1.625

<r²>	34.851
(<r²>)^1/2	5.903

All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: M06-2X/STO-3G

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)