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	hartrees
Energy at 0K	-588.993663
Energy at 298.15K
HF Energy	-588.113745
Nuclear repulsion energy	187.839991

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2470	2470	76.50
2	A₁	874	874	98.44
3	A₁	429	429	92.47
4	E	1031	1031	310.91
4	E	1031	1031	310.91
5	E	885	885	29.07
5	E	885	885	29.07
6	E	313	313	16.44
6	E	313	313	16.44

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.327
H2	0.000	0.000	1.773
F3	0.000	1.476	-0.235
F4	1.278	-0.738	-0.235
F5	-1.278	-0.738	-0.235

	Si1	H2	F3	F4	F5
Si1		1.4461	1.5791	1.5791	1.5791
H2	1.4461		2.4918	2.4918	2.4918
F3	1.5791	2.4918		2.5561	2.5561
F4	1.5791	2.4918	2.5561		2.5561
F5	1.5791	2.4918	2.5561	2.5561

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
H2	Si1	F3	110.836	H2	Si1	F4	110.836
H2	Si1	F5	110.836	F3	Si1	F4	108.073
F3	Si1	F5	108.073	F4	Si1	F5	108.073

All results from a given calculation for SiHF₃ (trifluorosilane)

using model chemistry: MP3=FULL/6-311G**

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiHF3 (trifluorosilane)

using model chemistry: MP3=FULL/6-311G**

States and conformations

All results from a given calculation for SiHF₃ (trifluorosilane)