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	hartrees
Energy at 0K	-390.534882
Energy at 298.15K
HF Energy	-390.200343
Nuclear repulsion energy	62.861031

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2329	2329	33.59
2	A₁	1055	1055	296.26
3	A₁	888	888	61.89
4	E	2331	2331	159.72
5	E	2331	2331	159.72
6	E	996	996	129.62
7	E	996	996	129.62
8	E	762	762	77.01
9	E	762	762	77.01

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.503
F2	0.000	0.000	-1.107
H3	0.000	1.394	0.974
H4	-1.207	-0.697	0.974
H5	1.207	-0.697	0.974

	Si1	F2	H3	H4	H5
Si1		1.6108	1.4712	1.4712	1.4712
F2	1.6108		2.5049	2.5049	2.5049
H3	1.4712	2.5049		2.4145	2.4145
H4	1.4712	2.5049	2.4145		2.4145
H5	1.4712	2.5049	2.4145	2.4145

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.643	F2	Si1	H4	108.643
F2	Si1	H5	108.643	H3	Si1	H4	110.287
H3	Si1	H5	110.287	H4	Si1	H5	110.287

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: CCSD/6-311G**

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: CCSD/6-311G**

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)