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	hartrees
Energy at 0K	-391.200175
Energy at 298.15K
HF Energy	-391.200175
Nuclear repulsion energy	61.902502

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)	Raman Act (Å⁴/u)	Dep P	Dep U
1	A₁	2191	2182	32.95	253.07	0.04	0.08
2	A₁	1001	997	228.92	17.67	0.68	0.81
3	A₁	822	819	50.18	6.19	0.46	0.63
4	E	2199	2191	154.88	75.04	0.75	0.86
4	E	2199	2191	154.91	75.04	0.75	0.86
5	E	927	923	95.99	26.59	0.75	0.86
5	E	927	923	95.99	26.59	0.75	0.86
6	E	713	710	58.37	17.61	0.75	0.86
6	E	713	710	58.37	17.61	0.75	0.86

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.511
F2	0.000	0.000	-1.126
H3	0.000	1.410	0.993
H4	-1.221	-0.705	0.993
H5	1.221	-0.705	0.993

	Si1	F2	H3	H4	H5
Si1		1.6374	1.4899	1.4899	1.4899
F2	1.6374		2.5453	2.5453	2.5453
H3	1.4899	2.5453		2.4418	2.4418
H4	1.4899	2.5453	2.4418		2.4418
H5	1.4899	2.5453	2.4418	2.4418

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.869	F2	Si1	H4	108.869
F2	Si1	H5	108.869	H3	Si1	H4	110.067
H3	Si1	H5	110.067	H4	Si1	H5	110.067

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: BLYP/6-311G**

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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Number	Element	Mulliken
1	Si	0.840
2	F	-0.403
3	H	-0.146
4	H	-0.146
5	H	-0.146

	x	y	z	Total
	0.000	0.000	1.467	1.467
CHELPG
AIM
ESP

<r²>	36.723
(<r²>)^1/2	6.060

All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: BLYP/6-311G**

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)