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	hartrees
Energy at 0K	-391.198923
Energy at 298.15K
HF Energy	-391.198923
Nuclear repulsion energy	62.604348

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)	Raman Act (Å⁴/u)	Dep P	Dep U
1	A₁	2267	2168	30.88	241.59	0.04	0.08
2	A₁	1019	975	244.40	16.19	0.67	0.80
3	A₁	868	830	54.53	5.45	0.52	0.68
4	E	2273	2175	144.11	70.02	0.75	0.86
4	E	2273	2175	144.13	70.02	0.75	0.86
5	E	955	913	100.25	24.68	0.75	0.86
5	E	955	913	100.26	24.68	0.75	0.86
6	E	733	701	64.29	15.74	0.75	0.86
6	E	733	701	64.29	15.74	0.75	0.86

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.505
F2	0.000	0.000	-1.111
H3	0.000	1.404	0.978
H4	-1.216	-0.702	0.978
H5	1.216	-0.702	0.978

	Si1	F2	H3	H4	H5
Si1		1.6154	1.4817	1.4817	1.4817
F2	1.6154		2.5170	2.5170	2.5170
H3	1.4817	2.5170		2.4317	2.4317
H4	1.4817	2.5170	2.4317		2.4317
H5	1.4817	2.5170	2.4317	2.4317

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.642	F2	Si1	H4	108.642
F2	Si1	H5	108.642	H3	Si1	H4	110.288
H3	Si1	H5	110.288	H4	Si1	H5	110.288

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: mPW1PW91/6-311G**

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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Number	Element	Mulliken
1	Si	0.846
2	F	-0.435
3	H	-0.137
4	H	-0.137
5	H	-0.137

	x	y	z	Total
	0.000	0.000	1.566	1.566
CHELPG
AIM
ESP

<r²>	35.985
(<r²>)^1/2	5.999

All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: mPW1PW91/6-311G**

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)