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	hartrees
Energy at 0K	-390.958008
Energy at 298.15K
HF Energy	-390.958008
Nuclear repulsion energy	61.967561

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)	Raman Act (Å⁴/u)	Dep P	Dep U
1	A₁	2185	2165	30.73	255.07	0.04	0.08
2	A₁	985	976	216.53	17.32	0.66	0.80
3	A₁	831	823	44.45	6.78	0.49	0.66
4	E	2195	2175	140.02	75.47	0.75	0.86
4	E	2195	2175	140.06	75.46	0.75	0.86
5	E	911	903	85.54	26.97	0.75	0.86
5	E	911	903	85.55	26.98	0.75	0.86
6	E	704	698	55.81	17.29	0.75	0.86
6	E	704	698	55.81	17.29	0.75	0.86

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.509
F2	0.000	0.000	-1.123
H3	0.000	1.414	0.993
H4	-1.225	-0.707	0.993
H5	1.225	-0.707	0.993

	Si1	F2	H3	H4	H5
Si1		1.6327	1.4948	1.4948	1.4948
F2	1.6327		2.5457	2.5457	2.5457
H3	1.4948	2.5457		2.4495	2.4495
H4	1.4948	2.5457	2.4495		2.4495
H5	1.4948	2.5457	2.4495	2.4495

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.895	F2	Si1	H4	108.895
F2	Si1	H5	108.895	H3	Si1	H4	110.041
H3	Si1	H5	110.041	H4	Si1	H5	110.042

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: PBEPBE/6-311G**

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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Number	Element	Mulliken
1	Si	0.747
2	F	-0.392
3	H	-0.118
4	H	-0.118
5	H	-0.118

	x	y	z	Total
	0.000	0.000	1.455	1.455
CHELPG
AIM
ESP

	x	y	z
x	3.803	0.000	0.000
y	0.000	3.803	-0.000
z	0.000	-0.000	3.159

<r²>	36.583
(<r²>)^1/2	6.048

All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: PBEPBE/6-311G**

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)