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	hartrees
Energy at 0K	-391.233327
Energy at 298.15K
HF Energy	-391.233327
Nuclear repulsion energy	62.447256

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)	Raman Act (Å⁴/u)	Dep P	Dep U
1	A₁	2276	2276	32.45	236.34	0.04	0.08
2	A₁	1027	1027	248.91	15.76	0.68	0.81
3	A₁	857	857	54.60	5.42	0.47	0.64
4	E	2281	2281	148.11	69.24	0.75	0.86
4	E	2281	2281	148.15	69.24	0.75	0.86
5	E	964	964	102.48	24.31	0.75	0.86
5	E	964	964	102.50	24.32	0.75	0.86
6	E	733	733	63.43	15.63	0.75	0.86
6	E	733	733	63.43	15.63	0.75	0.86

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.507
F2	0.000	0.000	-1.115
H3	0.000	1.402	0.980
H4	-1.214	-0.701	0.980
H5	1.214	-0.701	0.980

	Si1	F2	H3	H4	H5
Si1		1.6218	1.4802	1.4802	1.4802
F2	1.6218		2.5214	2.5214	2.5214
H3	1.4802	2.5214		2.4289	2.4289
H4	1.4802	2.5214	2.4289		2.4289
H5	1.4802	2.5214	2.4289	2.4289

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.662	F2	Si1	H4	108.662
F2	Si1	H5	108.662	H3	Si1	H4	110.268
H3	Si1	H5	110.268	H4	Si1	H5	110.268

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: TPSSh/6-311G**

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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Number	Element	Mulliken
1	Si	0.844
2	F	-0.426
3	H	-0.139
4	H	-0.139
5	H	-0.139

	x	y	z	Total
	0.000	0.000	1.510	1.510
CHELPG
AIM
ESP

	x	y	z
x	3.568	0.000	0.000
y	0.000	3.568	-0.000
z	0.000	-0.000	2.978

<r²>	36.101
(<r²>)^1/2	6.008

All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: TPSSh/6-311G**

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)