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	hartrees
Energy at 0K	-589.164227
Energy at 298.15K
HF Energy	-588.214339
Nuclear repulsion energy	188.016107

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)	Raman Act (Å⁴/u)	Dep P	Dep U
1	A₁	2428	2302	65.73	90.23	0.10	0.18
2	A₁	856	812	79.00	5.97	0.00	0.01
3	A₁	420	398	70.25	0.56	0.57	0.72
4	E	1005	953	261.38	0.37	0.75	0.86
4	E	1005	953	261.38	0.37	0.75	0.86
5	E	859	815	20.75	4.38	0.75	0.86
5	E	859	815	20.75	4.38	0.75	0.86
6	E	302	287	12.40	0.39	0.75	0.86
6	E	302	287	12.40	0.39	0.75	0.86

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.322
H2	0.000	0.000	1.774
F3	0.000	1.476	-0.233
F4	1.278	-0.738	-0.233
F5	-1.278	-0.738	-0.233

	Si1	H2	F3	F4	F5
Si1		1.4518	1.5767	1.5767	1.5767
H2	1.4518		2.4912	2.4912	2.4912
F3	1.5767	2.4912		2.5559	2.5559
F4	1.5767	2.4912	2.5559		2.5559
F5	1.5767	2.4912	2.5559	2.5559

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
H2	Si1	F3	110.622	H2	Si1	F4	110.622
H2	Si1	F5	110.622	F3	Si1	F4	108.296
F3	Si1	F5	108.296	F4	Si1	F5	108.296

All results from a given calculation for SiHF₃ (trifluorosilane)

using model chemistry: MP2/cc-pVQZ

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiHF3 (trifluorosilane)

using model chemistry: MP2/cc-pVQZ

States and conformations

All results from a given calculation for SiHF₃ (trifluorosilane)