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	hartrees
Energy at 0K	-589.904937
Energy at 298.15K
HF Energy	-589.904937
Nuclear repulsion energy	188.197062

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.323
H2	0.000	0.000	1.780
F3	0.000	1.474	-0.233
F4	1.276	-0.737	-0.233
F5	-1.276	-0.737	-0.233

	Si1	H2	F3	F4	F5
Si1		1.4576	1.5750	1.5750	1.5750
H2	1.4576		2.4951	2.4951	2.4951
F3	1.5750	2.4951		2.5523	2.5523
F4	1.5750	2.4951	2.5523		2.5523
F5	1.5750	2.4951	2.5523	2.5523

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
H2	Si1	F3	110.669	H2	Si1	F4	110.669
H2	Si1	F5	110.669	F3	Si1	F4	108.248
F3	Si1	F5	108.248	F4	Si1	F5	108.248

Number	Element	Mulliken
1	Si	1.999
2	H	-0.095
3	F	-0.635
4	F	-0.635
5	F	-0.635

All results from a given calculation for SiHF₃ (trifluorosilane)

using model chemistry: wB97X-D/aug-cc-pVQZ

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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<r²>	82.288
(<r²>)^1/2	9.071

All results from a given calculation for SiHF3 (trifluorosilane)

using model chemistry: wB97X-D/aug-cc-pVQZ

States and conformations

All results from a given calculation for SiHF₃ (trifluorosilane)