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	hartrees
Energy at 0K	-390.613022
Energy at 298.15K
HF Energy	-390.233508
Nuclear repulsion energy	63.453286

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2330	2330	33.55
2	A₁	1032	1032	213.71
3	A₁	902	902	77.13
4	E	2328	2328	148.77
4	E	2328	2328	148.77
5	E	1008	1008	98.57
5	E	1008	1008	98.57
6	E	757	757	62.66
6	E	757	757	62.66

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.498
F2	0.000	0.000	-1.094
H3	0.000	1.394	0.960
H4	-1.207	-0.697	0.960
H5	1.207	-0.697	0.960

	Si1	F2	H3	H4	H5
Si1		1.5913	1.4683	1.4683	1.4683
F2	1.5913		2.4816	2.4816	2.4816
H3	1.4683	2.4816		2.4140	2.4140
H4	1.4683	2.4816	2.4140		2.4140
H5	1.4683	2.4816	2.4140	2.4140

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.340	F2	Si1	H4	108.340
F2	Si1	H5	108.340	H3	Si1	H4	110.578
H3	Si1	H5	110.578	H4	Si1	H5	110.578

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: CID/aug-cc-pV(T+d)Z

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: CID/aug-cc-pV(T+d)Z

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)