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	hartrees
Energy at 0K	-390.791840
Energy at 298.15K
HF Energy	-390.233251
Nuclear repulsion energy	63.142863

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.501
F2	0.000	0.000	-1.100
H3	0.000	1.396	0.963
H4	-1.209	-0.698	0.963
H5	1.209	-0.698	0.963

	Si1	F2	H3	H4	H5
Si1		1.6015	1.4702	1.4702	1.4702
F2	1.6015		2.4913	2.4913	2.4913
H3	1.4702	2.4913		2.4174	2.4174
H4	1.4702	2.4913	2.4174		2.4174
H5	1.4702	2.4913	2.4174	2.4174

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.321	F2	Si1	H4	108.321
F2	Si1	H5	108.321	H3	Si1	H4	110.596
H3	Si1	H5	110.596	H4	Si1	H5	110.596

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: MP4=FULL/aug-cc-pV(T+d)Z

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: MP4=FULL/aug-cc-pV(T+d)Z

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)