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	hartrees
Energy at 0K	-588.952667
Energy at 298.15K
HF Energy	-588.150165
Nuclear repulsion energy	186.496684

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2417	2290	66.14
2	A₁	846	801	92.86
3	A₁	409	388	84.52
4	E	987	935	285.57
4	E	987	935	285.57
5	E	833	789	38.96
6	E	289	274	15.30
5	E	833	789	38.96
6	E	289	274	15.30

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.330
H2	0.000	0.000	1.782
F3	0.000	1.486	-0.237
F4	1.287	-0.743	-0.237
F5	-1.287	-0.743	-0.237

	Si1	H2	F3	F4	F5
Si1		1.4519	1.5908	1.5907	1.5907
H2	1.4519		2.5069	2.5069	2.5069
F3	1.5908	2.5069		2.5744	2.5744
F4	1.5907	2.5069	2.5744		2.5744
F5	1.5907	2.5069	2.5744	2.5744

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
H2	Si1	F3	110.875	H2	Si1	F4	110.875
H2	Si1	F5	110.875	F3	Si1	F4	108.032
F3	Si1	F5	108.032	F4	Si1	F5	108.032

All results from a given calculation for SiHF₃ (trifluorosilane)

using model chemistry: CCSD=FULL/TZVP

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiHF3 (trifluorosilane)

using model chemistry: CCSD=FULL/TZVP

States and conformations

All results from a given calculation for SiHF₃ (trifluorosilane)