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	hartrees
Energy at 0K	-391.208634
Energy at 298.15K
HF Energy	-391.208634
Nuclear repulsion energy	61.572006

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)	Raman Act (Å⁴/u)	Dep P	Dep U
1	A₁	2181	2176	32.01	260.22	0.04	0.08
2	A₁	958	956	203.28	14.13	0.68	0.81
3	A₁	802	800	73.48	6.29	0.42	0.60
4	E	2196	2190	142.51	71.46	0.75	0.86
4	E	2196	2190	142.53	71.46	0.75	0.86
5	E	930	927	86.07	21.38	0.75	0.86
5	E	930	927	86.08	21.37	0.75	0.86
6	E	692	690	50.21	18.38	0.75	0.86
6	E	692	690	50.21	18.38	0.75	0.86

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.518
F2	0.000	0.000	-1.133
H3	0.000	1.417	0.982
H4	-1.227	-0.708	0.982
H5	1.227	-0.708	0.982

	Si1	F2	H3	H4	H5
Si1		1.6500	1.4913	1.4913	1.4913
F2	1.6500		2.5457	2.5457	2.5457
H3	1.4913	2.5457		2.4542	2.4542
H4	1.4913	2.5457	2.4542		2.4542
H5	1.4913	2.5457	2.4542	2.4542

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.165	F2	Si1	H4	108.165
F2	Si1	H5	108.165	H3	Si1	H4	110.745
H3	Si1	H5	110.745	H4	Si1	H5	110.745

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: BLYP/TZVP

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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Number	Element	Mulliken
1	Si	0.645
2	F	-0.344
3	H	-0.100
4	H	-0.100
5	H	-0.100

	x	y	z	Total
	0.000	0.000	1.629	1.629
CHELPG
AIM
ESP

<r²>	36.976
(<r²>)^1/2	6.081

All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: BLYP/TZVP

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)