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	hartrees
Energy at 0K	-391.163138
Energy at 298.15K
HF Energy	-391.163138
Nuclear repulsion energy	62.498252

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)	Raman Act (Å⁴/u)	Dep P	Dep U
1	A₁	2311	2187	29.68	239.82	0.04	0.08
2	A₁	991	938	217.88	11.97	0.69	0.81
3	A₁	869	823	84.17	4.79	0.49	0.66
4	E	2318	2193	135.07	62.94	0.75	0.86
4	E	2317	2193	135.42	62.66	0.75	0.86
5	E	973	921	93.24	18.02	0.75	0.86
5	E	973	921	93.25	18.17	0.75	0.86
6	E	723	684	61.42	15.39	0.75	0.86
6	E	723	684	60.95	15.45	0.75	0.86

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.509
F2	0.000	0.000	-1.113
H3	0.000	1.405	0.964
H4	-1.216	-0.702	0.964
H5	1.216	-0.702	0.964

	Si1	F2	H3	H4	H5
Si1		1.6225	1.4765	1.4765	1.4765
F2	1.6225		2.5078	2.5078	2.5078
H3	1.4765	2.5078		2.4328	2.4328
H4	1.4765	2.5078	2.4328		2.4328
H5	1.4765	2.5078	2.4328	2.4328

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	107.954	F2	Si1	H4	107.954
F2	Si1	H5	107.954	H3	Si1	H4	110.945
H3	Si1	H5	110.945	H4	Si1	H5	110.945

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: M06-2X/TZVP

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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Number	Element	Mulliken
1	Si	0.661
2	F	-0.375
3	H	-0.095
4	H	-0.095
5	H	-0.095

	x	y	z	Total
	0.000	0.000	1.732	1.732
CHELPG
AIM
ESP

	x	y	z
x	3.651	0.000	0.000
y	0.000	3.652	-0.006
z	0.000	-0.006	3.030

<r²>	36.081
(<r²>)^1/2	6.007

All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: M06-2X/TZVP

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)