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	hartrees
Energy at 0K	-391.195115
Energy at 298.15K
HF Energy	-391.195115
Nuclear repulsion energy	62.339463

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)	Raman Act (Å⁴/u)	Dep P	Dep U
1	A₁	2257	2155	32.00	245.76	0.04	0.08
2	A₁	985	940	224.24	13.05	0.68	0.81
3	A₁	857	819	79.06	5.41	0.48	0.65
4	E	2261	2160	148.12	66.25	0.75	0.86
4	E	2261	2160	148.16	66.20	0.75	0.86
5	E	963	919	95.53	20.02	0.75	0.86
5	E	963	919	95.48	20.02	0.75	0.86
6	E	717	685	59.68	16.47	0.75	0.86
6	E	717	685	59.67	16.41	0.75	0.86

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.509
F2	0.000	0.000	-1.116
H3	0.000	1.409	0.971
H4	-1.220	-0.705	0.971
H5	1.220	-0.705	0.971

	Si1	F2	H3	H4	H5
Si1		1.6252	1.4828	1.4828	1.4828
F2	1.6252		2.5181	2.5181	2.5181
H3	1.4828	2.5181		2.4405	2.4405
H4	1.4828	2.5181	2.4405		2.4405
H5	1.4828	2.5181	2.4405	2.4405

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.144	F2	Si1	H4	108.144
F2	Si1	H5	108.144	H3	Si1	H4	110.765
H3	Si1	H5	110.765	H4	Si1	H5	110.765

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: wB97X-D/TZVP

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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Number	Element	Mulliken
1	Si	0.667
2	F	-0.356
3	H	-0.104
4	H	-0.104
5	H	-0.104

	x	y	z	Total
	0.000	0.000	1.635	1.635
CHELPG
AIM
ESP

	x	y	z
x	3.744	0.000	0.000
y	0.000	3.746	0.001
z	0.000	0.001	3.118

<r²>	36.199
(<r²>)^1/2	6.017

All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: wB97X-D/TZVP

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)