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	hartrees
Energy at 0K	-390.652885
Energy at 298.15K
HF Energy	-390.232829
Nuclear repulsion energy	63.088996

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2283	2283	32.88
2	A₁	1005	1005	199.08
3	A₁	879	879	72.34
4	E	2287	2287	139.08
5	E	2287	2287	139.08
6	E	980	980	89.28
7	E	980	980	89.28
8	E	739	739	57.45
9	E	739	739	57.45

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.501
F2	0.000	0.000	-1.101
H3	0.000	1.400	0.965
H4	-1.212	-0.700	0.965
H5	1.212	-0.700	0.965

	Si1	F2	H3	H4	H5
Si1		1.6015	1.4746	1.4746	1.4746
F2	1.6015		2.4948	2.4948	2.4948
H3	1.4746	2.4948		2.4245	2.4245
H4	1.4746	2.4948	2.4245		2.4245
H5	1.4746	2.4948	2.4245	2.4245

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.327	F2	Si1	H4	108.327
F2	Si1	H5	108.327	H3	Si1	H4	110.591
H3	Si1	H5	110.591	H4	Si1	H5	110.591

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: QCISD/aug-cc-pCVTZ

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: QCISD/aug-cc-pCVTZ

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)