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	hartrees
Energy at 0K	-390.649414
Energy at 298.15K
HF Energy	-390.232919
Nuclear repulsion energy	63.180053

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2288	2288	32.73
2	A₁	1009	1009	203.38
3	A₁	888	888	73.26
4	E	2293	2293	140.33
5	E	2293	2293	140.33
6	E	984	984	90.87
7	E	984	984	90.87
8	E	743	743	59.18
9	E	743	743	59.18

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.500
F2	0.000	0.000	-1.099
H3	0.000	1.399	0.964
H4	-1.212	-0.700	0.964
H5	1.212	-0.700	0.964

	Si1	F2	H3	H4	H5
Si1		1.5984	1.4741	1.4741	1.4741
F2	1.5984		2.4922	2.4922	2.4922
H3	1.4741	2.4922		2.4235	2.4235
H4	1.4741	2.4922	2.4235		2.4235
H5	1.4741	2.4922	2.4235	2.4235

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.345	F2	Si1	H4	108.345
F2	Si1	H5	108.345	H3	Si1	H4	110.574
H3	Si1	H5	110.574	H4	Si1	H5	110.574

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: CCD/aug-cc-pCVTZ

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: CCD/aug-cc-pCVTZ

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)