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	hartrees
Energy at 0K	-589.109669
Energy at 298.15K
HF Energy	-588.183438
Nuclear repulsion energy	187.420137

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)
1	A₁	2392	2392
2	A₁	414	414
3	E	993	993
4	E	993	993
4	E	849	849
5	E	848	848
5	E	848	848
6	E	295	295
6	E	295	295

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.326
H2	0.000	0.000	1.784
F3	0.000	1.479	-0.235
F4	1.281	-0.740	-0.235
F5	-1.281	-0.740	-0.235

	Si1	H2	F3	F4	F5
Si1		1.4576	1.5821	1.5821	1.5821
H2	1.4576		2.5027	2.5027	2.5027
F3	1.5821	2.5027		2.5620	2.5620
F4	1.5821	2.5027	2.5620		2.5620
F5	1.5821	2.5027	2.5620	2.5620

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
H2	Si1	F3	110.778	H2	Si1	F4	110.778
H2	Si1	F5	110.778	F3	Si1	F4	108.134
F3	Si1	F5	108.134	F4	Si1	F5	108.134

All results from a given calculation for SiHF₃ (trifluorosilane)

using model chemistry: CCSD(T)/daug-cc-pVTZ

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiHF3 (trifluorosilane)

using model chemistry: CCSD(T)/daug-cc-pVTZ

States and conformations

All results from a given calculation for SiHF₃ (trifluorosilane)