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	hartrees
Energy at 0K	-588.974503
Energy at 298.15K
HF Energy	-588.184706
Nuclear repulsion energy	189.193059

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.324
H2	0.000	0.000	1.772
F3	0.000	1.465	-0.234
F4	1.268	-0.732	-0.234
F5	-1.268	-0.732	-0.234

	Si1	H2	F3	F4	F5
Si1		1.4475	1.5672	1.5672	1.5672
H2	1.4475		2.4831	2.4831	2.4831
F3	1.5672	2.4831		2.5368	2.5368
F4	1.5672	2.4831	2.5368		2.5368
F5	1.5672	2.4831	2.5368	2.5368

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
H2	Si1	F3	110.846	H2	Si1	F4	110.846
H2	Si1	F5	110.846	F3	Si1	F4	108.062
F3	Si1	F5	108.062	F4	Si1	F5	108.062

All results from a given calculation for SiHF₃ (trifluorosilane)

using model chemistry: CISD/daug-cc-pVTZ

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiHF3 (trifluorosilane)

using model chemistry: CISD/daug-cc-pVTZ

States and conformations

All results from a given calculation for SiHF₃ (trifluorosilane)