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	hartrees
Energy at 0K	-390.611290
Energy at 298.15K
HF Energy	-390.228850
Nuclear repulsion energy	63.158787

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2331	2331	33.60
2	A₁	1025	1025	207.89
3	A₁	896	896	79.00
4	E	2333	2333	145.90
5	E	2333	2333	145.90
6	E	1002	1002	97.74
7	E	1002	1002	97.74
8	E	752	752	61.05
9	E	752	752	61.05

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.501
F2	0.000	0.000	-1.100
H3	0.000	1.397	0.962
H4	-1.210	-0.699	0.962
H5	1.210	-0.699	0.962

	Si1	F2	H3	H4	H5
Si1		1.6005	1.4713	1.4713	1.4713
F2	1.6005		2.4905	2.4905	2.4905
H3	1.4713	2.4905		2.4200	2.4200
H4	1.4713	2.4905	2.4200		2.4200
H5	1.4713	2.4905	2.4200	2.4200

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.265	F2	Si1	H4	108.265
F2	Si1	H5	108.265	H3	Si1	H4	110.650
H3	Si1	H5	110.650	H4	Si1	H5	110.650

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: CISD/daug-cc-pVTZ

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: CISD/daug-cc-pVTZ

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)