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	hartrees
Energy at 0K	-588.805243
Energy at 298.15K
HF Energy	-588.059924
Nuclear repulsion energy	183.202316

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)
1	A₁	2373	2373
2	A₁	811	811
3	A₁	390	390
4	E	948	948
4	E	948	948
5	E	821	821
5	E	821	821
6	E	275	275
6	E	275	275

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.339
H2	0.000	0.000	1.805
F3	0.000	1.512	-0.243
F4	1.310	-0.756	-0.243
F5	-1.310	-0.756	-0.243

	Si1	H2	F3	F4	F5
Si1		1.4660	1.6205	1.6205	1.6205
H2	1.4660		2.5461	2.5461	2.5461
F3	1.6205	2.5461		2.6192	2.6192
F4	1.6205	2.5461	2.6192		2.6192
F5	1.6205	2.5461	2.6192	2.6192

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
H2	Si1	F3	111.061	H2	Si1	F4	111.061
H2	Si1	F5	111.061	F3	Si1	F4	107.835
F3	Si1	F5	107.835	F4	Si1	F5	107.835

All results from a given calculation for SiHF₃ (trifluorosilane)

using model chemistry: CCSD(T)/daug-cc-pVDZ

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiHF3 (trifluorosilane)

using model chemistry: CCSD(T)/daug-cc-pVDZ

States and conformations

All results from a given calculation for SiHF₃ (trifluorosilane)