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	hartrees
Energy at 0K	-589.095185
Energy at 298.15K
HF Energy	-588.199942
Nuclear repulsion energy	188.312459

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)
1	A₁	2391	2391
2	A₁	861	861
3	A₁	422	422
4	E	1011	1011
4	E	1011	1011
5	E	850	850
5	E	850	850
6	E	304	304
6	E	304	304

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.321
H2	0.000	0.000	1.775
F3	0.000	1.474	-0.232
F4	1.276	-0.737	-0.232
F5	-1.276	-0.737	-0.232

	Si1	H2	F3	F4	F5
Si1		1.4542	1.5739	1.5739	1.5739
H2	1.4542		2.4900	2.4900	2.4900
F3	1.5739	2.4900		2.5523	2.5523
F4	1.5739	2.4900	2.5523		2.5523
F5	1.5739	2.4900	2.5523	2.5523

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
H2	Si1	F3	110.569	H2	Si1	F4	110.569
H2	Si1	F5	110.569	F3	Si1	F4	108.351
F3	Si1	F5	108.351	F4	Si1	F5	108.351

All results from a given calculation for SiHF₃ (trifluorosilane)

using model chemistry: QCISD(T)/Def2TZVPP

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiHF3 (trifluorosilane)

using model chemistry: QCISD(T)/Def2TZVPP

States and conformations

All results from a given calculation for SiHF₃ (trifluorosilane)