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	hartrees
Energy at 0K	-589.064751
Energy at 298.15K
HF Energy	-588.200493
Nuclear repulsion energy	188.968822

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2406	2406	69.11
2	A₁	877	877	86.49
3	A₁	429	429	76.61
4	E	1026	1026	270.11
4	E	1026	1026	270.11
5	E	863	863	27.61
5	E	863	863	27.61
6	E	309	309	13.21
6	E	309	309	13.21

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.320
H2	0.000	0.000	1.772
F3	0.000	1.468	-0.232
F4	1.271	-0.734	-0.232
F5	-1.271	-0.734	-0.232

	Si1	H2	F3	F4	F5
Si1		1.4524	1.5683	1.5683	1.5683
H2	1.4524		2.4842	2.4842	2.4842
F3	1.5683	2.4842		2.5428	2.5428
F4	1.5683	2.4842	2.5428		2.5428
F5	1.5683	2.4842	2.5428	2.5428

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
H2	Si1	F3	110.592	H2	Si1	F4	110.592
H2	Si1	F5	110.592	F3	Si1	F4	108.327
F3	Si1	F5	108.327	F4	Si1	F5	108.328

All results from a given calculation for SiHF₃ (trifluorosilane)

using model chemistry: CCD/Def2TZVPP

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiHF3 (trifluorosilane)

using model chemistry: CCD/Def2TZVPP

States and conformations

All results from a given calculation for SiHF₃ (trifluorosilane)