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	hartrees
Energy at 0K	-390.605138
Energy at 298.15K
HF Energy	-390.232509
Nuclear repulsion energy	63.468707

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2336	2336	32.53
2	A₁	1035	1035	229.61
3	A₁	912	912	69.50
4	E	2335	2335	153.79
5	E	2335	2335	153.79
6	E	1010	1010	103.89
7	E	1010	1010	103.89
8	E	755	755	65.58
9	E	755	755	65.58

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.497
F2	0.000	0.000	-1.094
H3	0.000	1.393	0.961
H4	-1.206	-0.696	0.961
H5	1.206	-0.696	0.961

	Si1	F2	H3	H4	H5
Si1		1.5908	1.4680	1.4680	1.4680
F2	1.5908		2.4820	2.4820	2.4820
H3	1.4680	2.4820		2.4126	2.4126
H4	1.4680	2.4820	2.4126		2.4126
H5	1.4680	2.4820	2.4126	2.4126

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.407	F2	Si1	H4	108.407
F2	Si1	H5	108.407	H3	Si1	H4	110.514
H3	Si1	H5	110.514	H4	Si1	H5	110.514

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: CISD/Def2TZVPP

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: CISD/Def2TZVPP

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)