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	hartrees
Energy at 0K	-390.634355
Energy at 298.15K
HF Energy	-390.232410
Nuclear repulsion energy	63.294520

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2295	2295	31.31
2	A₁	1016	1016	223.88
3	A₁	903	903	63.76
4	E	2298	2298	144.76
5	E	2298	2298	144.76
6	E	990	990	97.65
7	E	990	990	97.65
8	E	744	744	62.92
9	E	744	744	62.92

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.498
F2	0.000	0.000	-1.096
H3	0.000	1.398	0.964
H4	-1.210	-0.699	0.964
H5	1.210	-0.699	0.964

	Si1	F2	H3	H4	H5
Si1		1.5946	1.4732	1.4732	1.4732
F2	1.5946		2.4898	2.4898	2.4898
H3	1.4732	2.4898		2.4207	2.4207
H4	1.4732	2.4898	2.4207		2.4207
H5	1.4732	2.4898	2.4207	2.4207

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.440	F2	Si1	H4	108.440
F2	Si1	H5	108.440	H3	Si1	H4	110.482
H3	Si1	H5	110.482	H4	Si1	H5	110.482

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: CCD/Def2TZVPP

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: CCD/Def2TZVPP

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)