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	hartrees
Energy at 0K	-391.214280
Energy at 298.15K
HF Energy	-391.214280
Nuclear repulsion energy	63.092657

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)	Raman Act (Å⁴/u)	Dep P	Dep U
1	A₁	2244	2143	30.91	256.15	0.03	0.07
2	A₁	995	950	201.39	3.30	0.74	0.85
3	A₁	883	844	65.77	4.56	0.40	0.57
4	E	2243	2143	142.53	54.41	0.75	0.86
4	E	2243	2143	142.45	54.39	0.75	0.86
5	E	968	925	86.65	9.95	0.75	0.86
5	E	968	925	86.76	9.95	0.75	0.86
6	E	726	693	57.02	7.88	0.75	0.86
6	E	726	693	57.05	7.93	0.75	0.86

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.500
F2	0.000	0.000	-1.100
H3	0.000	1.401	0.967
H4	-1.214	-0.701	0.967
H5	1.214	-0.701	0.967

	Si1	F2	H3	H4	H5
Si1		1.6002	1.4769	1.4769	1.4769
F2	1.6002		2.4969	2.4969	2.4969
H3	1.4769	2.4969		2.4271	2.4271
H4	1.4769	2.4969	2.4271		2.4271
H5	1.4769	2.4969	2.4271	2.4271

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.410	F2	Si1	H4	108.410
F2	Si1	H5	108.410	H3	Si1	H4	110.511
H3	Si1	H5	110.511	H4	Si1	H5	110.511

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: wB97X-D/Def2TZVPP

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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Number	Element	Mulliken
1	Si	0.487
2	F	-0.331
3	H	-0.052
4	H	-0.052
5	H	-0.052

	x	y	z	Total
	0.000	0.000	1.286	1.286
CHELPG
AIM
ESP

	x	y	z
x	4.012	0.000	0.000
y	0.000	4.015	0.001
z	0.000	0.001	3.576

<r²>	35.619
(<r²>)^1/2	5.968

All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: wB97X-D/Def2TZVPP

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)