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	hartrees
Energy at 0K	-391.195876
Energy at 298.15K
HF Energy	-391.195876
Nuclear repulsion energy	62.590957

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)	Raman Act (Å⁴/u)	Dep P	Dep U
1	A₁	2195	2165	32.72	264.77	0.04	0.07
2	A₁	973	959	181.67	3.76	0.74	0.85
3	A₁	835	824	67.03	5.16	0.37	0.54
4	E	2203	2173	144.09	58.88	0.75	0.86
4	E	2203	2173	144.16	58.84	0.75	0.86
5	E	943	930	79.70	11.04	0.75	0.86
5	E	943	930	79.71	11.06	0.75	0.86
6	E	710	700	50.61	9.00	0.75	0.86
6	E	710	700	50.62	8.99	0.75	0.86

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.505
F2	0.000	0.000	-1.110
H3	0.000	1.409	0.974
H4	-1.220	-0.704	0.974
H5	1.220	-0.704	0.974

	Si1	F2	H3	H4	H5
Si1		1.6149	1.4845	1.4845	1.4845
F2	1.6149		2.5152	2.5152	2.5152
H3	1.4845	2.5152		2.4397	2.4397
H4	1.4845	2.5152	2.4397		2.4397
H5	1.4845	2.5152	2.4397	2.4397

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.411	F2	Si1	H4	108.411
F2	Si1	H5	108.411	H3	Si1	H4	110.510
H3	Si1	H5	110.510	H4	Si1	H5	110.510

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: B97D3/Def2TZVPP

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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Number	Element	Mulliken
1	Si	0.556
2	F	-0.314
3	H	-0.081
4	H	-0.081
5	H	-0.081

	x	y	z	Total
	0.000	0.000	1.230	1.230
CHELPG
AIM
ESP

<r²>	36.042
(<r²>)^1/2	6.003

All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: B97D3/Def2TZVPP

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)