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	hartrees
Energy at 0K	-588.684534
Energy at 298.15K
HF Energy	-588.015841
Nuclear repulsion energy	182.857482

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2402	2275	64.78
2	A₁	833	789	77.48
3	A₁	402	381	83.75
4	E	995	943	244.04
4	E	995	943	244.04
5	E	835	791	31.44
6	E	287	272	15.59
5	E	835	791	31.44
6	E	287	272	15.59

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.335
H2	0.000	0.000	1.797
F3	0.000	1.518	-0.240
F4	1.314	-0.759	-0.240
F5	-1.314	-0.759	-0.240

	Si1	H2	F3	F4	F5
Si1		1.4616	1.6230	1.6230	1.6230
H2	1.4616		2.5400	2.5400	2.5400
F3	1.6230	2.5400		2.6287	2.6287
F4	1.6230	2.5400	2.6287		2.6287
F5	1.6230	2.5400	2.6287	2.6287

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
H2	Si1	F3	110.757	H2	Si1	F4	110.757
H2	Si1	F5	110.757	F3	Si1	F4	108.156
F3	Si1	F5	108.156	F4	Si1	F5	108.156

All results from a given calculation for SiHF₃ (trifluorosilane)

using model chemistry: CCSD/cc-pVDZ

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiHF3 (trifluorosilane)

using model chemistry: CCSD/cc-pVDZ

States and conformations

All results from a given calculation for SiHF₃ (trifluorosilane)