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	hartrees
Energy at 0K	-588.709144
Energy at 298.15K
HF Energy	-588.015707
Nuclear repulsion energy	182.694364

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)
1	A₁	2401	2313
2	A₁	829	799
3	A₁	399	384
4	E	994	958
4	E	994	958
5	E	831	800
5	E	831	800
6	E	285	274
6	E	285	274

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.334
H2	0.000	0.000	1.798
F3	0.000	1.519	-0.240
F4	1.316	-0.760	-0.240
F5	-1.316	-0.760	-0.240

	Si1	H2	F3	F4	F5
Si1		1.4634	1.6244	1.6244	1.6244
H2	1.4634		2.5420	2.5420	2.5420
F3	1.6244	2.5420		2.6316	2.6316
F4	1.6244	2.5420	2.6316		2.6316
F5	1.6244	2.5420	2.6316	2.6316

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
H2	Si1	F3	110.712	H2	Si1	F4	110.712
H2	Si1	F5	110.712	F3	Si1	F4	108.202
F3	Si1	F5	108.202	F4	Si1	F5	108.202

All results from a given calculation for SiHF₃ (trifluorosilane)

using model chemistry: CCSD(T)=FULL/cc-pVDZ

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiHF3 (trifluorosilane)

using model chemistry: CCSD(T)=FULL/cc-pVDZ

States and conformations

All results from a given calculation for SiHF₃ (trifluorosilane)