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	hartrees
Energy at 0K	-390.486320
Energy at 298.15K
HF Energy	-390.162251
Nuclear repulsion energy	61.527301

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)
1	A₁	2267	2161
2	A₁	1015	967
3	A₁	857	817
4	E	2279	2172
5	E	2279	2172
6	E	959	914
7	E	959	914
8	E	731	697
9	E	731	696

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.519
F2	0.000	0.000	-1.135
H3	0.000	1.411	0.985
H4	-1.222	-0.705	0.985
H5	1.222	-0.705	0.985

	Si1	F2	H3	H4	H5
Si1		1.6543	1.4855	1.4855	1.4855
F2	1.6543		2.5464	2.5464	2.5464
H3	1.4855	2.5464		2.4433	2.4433
H4	1.4855	2.5464	2.4433		2.4433
H5	1.4855	2.5464	2.4433	2.4433

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.270	F2	Si1	H4	108.270
F2	Si1	H5	108.270	H3	Si1	H4	110.646
H3	Si1	H5	110.646	H4	Si1	H5	110.646

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: QCISD(T)/cc-pVDZ

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: QCISD(T)/cc-pVDZ

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)