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	hartrees
Energy at 0K	-390.478946
Energy at 298.15K
HF Energy	-390.162398
Nuclear repulsion energy	61.679472

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2284	2185	28.01
2	A₁	1021	977	247.58
3	A₁	870	832	42.76
4	E	2294	2195	138.25
5	E	2294	2195	138.25
6	E	969	927	107.41
7	E	969	927	107.41
8	E	738	706	65.47
9	E	738	706	65.47

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.518
F2	0.000	0.000	-1.132
H3	0.000	1.409	0.980
H4	-1.221	-0.705	0.980
H5	1.221	-0.705	0.980

	Si1	F2	H3	H4	H5
Si1		1.6496	1.4835	1.4835	1.4835
F2	1.6496		2.5394	2.5394	2.5394
H3	1.4835	2.5394		2.4412	2.4412
H4	1.4835	2.5394	2.4412		2.4412
H5	1.4835	2.5394	2.4412	2.4412

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.181	F2	Si1	H4	108.181
F2	Si1	H5	108.181	H3	Si1	H4	110.730
H3	Si1	H5	110.730	H4	Si1	H5	110.730

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: CCD/cc-pVDZ

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: CCD/cc-pVDZ

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)