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	hartrees
Energy at 0K	-390.495418
Energy at 298.15K
HF Energy	-390.162303
Nuclear repulsion energy	61.582598

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)
1	A₁	2281	2197
2	A₁	1016	979
3	A₁	862	830
4	E	2293	2209
5	E	2293	2209
6	E	961	925
7	E	961	925
8	E	732	705
9	E	732	705

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.518
F2	0.000	0.000	-1.134
H3	0.000	1.410	0.984
H4	-1.221	-0.705	0.984
H5	1.221	-0.705	0.984

	Si1	F2	H3	H4	H5
Si1		1.6525	1.4849	1.4849	1.4849
F2	1.6525		2.5444	2.5444	2.5444
H3	1.4849	2.5444		2.4422	2.4422
H4	1.4849	2.5444	2.4422		2.4422
H5	1.4849	2.5444	2.4422	2.4422

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.274	F2	Si1	H4	108.274
F2	Si1	H5	108.274	H3	Si1	H4	110.641
H3	Si1	H5	110.641	H4	Si1	H5	110.641

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: CCSD(T)=FULL/cc-pVDZ

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: CCSD(T)=FULL/cc-pVDZ

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)