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	hartrees
Energy at 0K	-391.123943
Energy at 298.15K
HF Energy	-391.123943
Nuclear repulsion energy	61.157320

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)	Raman Act (Å⁴/u)	Dep P	Dep U
1	A₁	2168	2150	30.65	240.27	0.04	0.08
2	A₁	982	973	195.36	9.75	0.67	0.80
3	A₁	827	819	33.01	6.00	0.43	0.60
4	E	2183	2164	145.55	66.13	0.75	0.86
4	E	2183	2164	145.58	66.13	0.75	0.86
5	E	921	914	81.65	19.91	0.75	0.86
5	E	921	914	81.66	19.92	0.75	0.86
6	E	704	698	48.91	14.17	0.75	0.86
6	E	704	698	48.91	14.17	0.75	0.86

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.521
F2	0.000	0.000	-1.141
H3	0.000	1.423	0.991
H4	-1.232	-0.711	0.991
H5	1.232	-0.711	0.991

	Si1	F2	H3	H4	H5
Si1		1.6625	1.4984	1.4984	1.4984
F2	1.6625		2.5632	2.5632	2.5632
H3	1.4984	2.5632		2.4646	2.4646
H4	1.4984	2.5632	2.4646		2.4646
H5	1.4984	2.5632	2.4646	2.4646

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.261	F2	Si1	H4	108.261
F2	Si1	H5	108.261	H3	Si1	H4	110.654
H3	Si1	H5	110.654	H4	Si1	H5	110.654

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: B97D3/cc-pVDZ

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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Number	Element	Mulliken
1	Si	0.541
2	F	-0.323
3	H	-0.073
4	H	-0.073
5	H	-0.073

	x	y	z	Total
	0.000	0.000	1.463	1.463
CHELPG
AIM
ESP

	x	y	z
x	3.779	0.000	0.000
y	0.000	3.779	-0.000
z	0.000	-0.000	3.224

<r²>	37.015
(<r²>)^1/2	6.084

All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: B97D3/cc-pVDZ

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)