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	hartrees
Energy at 0K	-588.947174
Energy at 298.15K
HF Energy	-588.176229
Nuclear repulsion energy	189.140159

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2472	2299	75.41
2	A₁	889	827	89.93
3	A₁	435	404	80.87
4	E	1039	966	275.37
4	E	1039	966	275.37
5	E	885	822	30.43
5	E	885	822	30.43
6	E	312	290	13.70
6	E	312	290	13.70

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.323
H2	0.000	0.000	1.770
F3	0.000	1.466	-0.233
F4	1.269	-0.733	-0.233
F5	-1.269	-0.733	-0.233

	Si1	H2	F3	F4	F5
Si1		1.4471	1.5675	1.5675	1.5675
H2	1.4471		2.4819	2.4819	2.4819
F3	1.5675	2.4819		2.5386	2.5386
F4	1.5675	2.4819	2.5386		2.5386
F5	1.5675	2.4819	2.5386	2.5386

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
H2	Si1	F3	110.767	H2	Si1	F4	110.767
H2	Si1	F5	110.767	F3	Si1	F4	108.145
F3	Si1	F5	108.145	F4	Si1	F5	108.145

All results from a given calculation for SiHF₃ (trifluorosilane)

using model chemistry: CISD/cc-pVTZ

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiHF3 (trifluorosilane)

using model chemistry: CISD/cc-pVTZ

States and conformations

All results from a given calculation for SiHF₃ (trifluorosilane)