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	hartrees
Energy at 0K	-589.040797
Energy at 298.15K
HF Energy	-588.175881
Nuclear repulsion energy	188.416006

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2423	2289	70.82
2	A₁	875	827	86.38
3	A₁	429	405	77.49
4	E	1025	968	262.62
4	E	1025	968	262.62
5	E	864	816	30.01
5	E	864	816	30.01
6	E	308	291	13.08
6	E	308	291	13.08

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.323
H2	0.000	0.000	1.776
F3	0.000	1.472	-0.233
F4	1.275	-0.736	-0.233
F5	-1.275	-0.736	-0.233

	Si1	H2	F3	F4	F5
Si1		1.4533	1.5733	1.5733	1.5733
H2	1.4533		2.4908	2.4908	2.4908
F3	1.5733	2.4908		2.5491	2.5491
F4	1.5733	2.4908	2.5491		2.5491
F5	1.5733	2.4908	2.5491	2.5491

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
H2	Si1	F3	110.703	H2	Si1	F4	110.703
H2	Si1	F5	110.703	F3	Si1	F4	108.212
F3	Si1	F5	108.212	F4	Si1	F5	108.212

All results from a given calculation for SiHF₃ (trifluorosilane)

using model chemistry: MP3/cc-pVTZ

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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HF vs MP2 Bad vib. Calc. vs exp. 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All results from a given calculation for SiHF3 (trifluorosilane)

using model chemistry: MP3/cc-pVTZ

States and conformations

All results from a given calculation for SiHF₃ (trifluorosilane)