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	hartrees
Energy at 0K	-390.628509
Energy at 298.15K
HF Energy	-390.225491
Nuclear repulsion energy	63.031911

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2290	2139	31.01
2	A₁	1015	947	216.68
3	A₁	896	837	63.50
4	E	2295	2143	145.99
5	E	2295	2143	145.99
6	E	987	921	98.59
7	E	987	921	98.59
8	E	744	694	62.82
9	E	744	694	62.82

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.501
F2	0.000	0.000	-1.102
H3	0.000	1.401	0.966
H4	-1.213	-0.701	0.966
H5	1.213	-0.701	0.966

	Si1	F2	H3	H4	H5
Si1		1.6027	1.4763	1.4763	1.4763
F2	1.6027		2.4980	2.4980	2.4980
H3	1.4763	2.4980		2.4267	2.4267
H4	1.4763	2.4980	2.4267		2.4267
H5	1.4763	2.4980	2.4267	2.4267

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.376	F2	Si1	H4	108.376
F2	Si1	H5	108.376	H3	Si1	H4	110.544
H3	Si1	H5	110.544	H4	Si1	H5	110.543

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: CCD/cc-pVTZ

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: CCD/cc-pVTZ

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)