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	hartrees
Energy at 0K	-391.262424
Energy at 298.15K
HF Energy	-391.262424
Nuclear repulsion energy	62.657585

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)	Raman Act (Å⁴/u)	Dep P	Dep U
1	A₁	2247	2172	30.29	263.68	0.04	0.07
2	A₁	991	958	190.40	3.83	0.74	0.85
3	A₁	860	832	64.34	4.51	0.37	0.54
4	E	2255	2180	141.35	57.26	0.75	0.86
4	E	2255	2180	141.36	57.26	0.75	0.86
5	E	961	929	87.31	10.84	0.75	0.86
5	E	961	929	87.31	10.84	0.75	0.86
6	E	723	699	54.55	9.31	0.75	0.86
6	E	723	699	54.55	9.31	0.75	0.86

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.506
F2	0.000	0.000	-1.109
H3	0.000	1.405	0.969
H4	-1.217	-0.702	0.969
H5	1.217	-0.702	0.969

	Si1	F2	H3	H4	H5
Si1		1.6149	1.4794	1.4794	1.4794
F2	1.6149		2.5087	2.5087	2.5087
H3	1.4794	2.5087		2.4334	2.4334
H4	1.4794	2.5087	2.4334		2.4334
H5	1.4794	2.5087	2.4334	2.4334

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.258	F2	Si1	H4	108.258
F2	Si1	H5	108.258	H3	Si1	H4	110.657
H3	Si1	H5	110.657	H4	Si1	H5	110.657

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: B3LYP/cc-pVTZ

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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Number	Element	Mulliken
1	Si	0.456
2	F	-0.302
3	H	-0.051
4	H	-0.051
5	H	-0.051

	x	y	z	Total
	0.000	0.000	1.300	1.300
CHELPG
AIM
ESP	-0.009	0.000	-1.330	1.330

<r²>	36.032
(<r²>)^1/2	6.003

All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: B3LYP/cc-pVTZ

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)