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	hartrees
Energy at 0K	-588.736503
Energy at 298.15K
HF Energy	-588.111365
Nuclear repulsion energy	188.214714

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2472	2297	74.31
2	A₁	883	820	103.10
3	A₁	434	403	95.71
4	E	1042	969	327.09
4	E	1042	969	327.09
5	E	896	832	22.35
5	E	896	832	22.35
6	E	316	293	17.31
6	E	316	293	17.31

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.327
H2	0.000	0.000	1.776
F3	0.000	1.472	-0.236
F4	1.275	-0.736	-0.236
F5	-1.275	-0.736	-0.236

	Si1	H2	F3	F4	F5
Si1		1.4487	1.5759	1.5759	1.5759
H2	1.4487		2.4926	2.4926	2.4926
F3	1.5759	2.4926		2.5494	2.5494
F4	1.5759	2.4926	2.5494		2.5494
F5	1.5759	2.4926	2.5494	2.5494

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
H2	Si1	F3	110.930	H2	Si1	F4	110.930
H2	Si1	F5	110.930	F3	Si1	F4	107.974
F3	Si1	F5	107.974	F4	Si1	F5	107.974

All results from a given calculation for SiHF₃ (trifluorosilane)

using model chemistry: CID/6-311G*

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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HF vs MP2 Bad vib. Calc. vs exp. 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All results from a given calculation for SiHF3 (trifluorosilane)

using model chemistry: CID/6-311G*

States and conformations

All results from a given calculation for SiHF₃ (trifluorosilane)