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	hartrees
Energy at 0K	-588.810609
Energy at 298.15K
HF Energy	-588.110440
Nuclear repulsion energy	186.725417

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)	Raman Act (Å⁴/u)	Dep P	Dep U
1	A₁	2438	2317	75.14	80.73	0.17	0.29
2	A₁	853	811	92.11	4.01	0.00	0.00
3	A₁	422	401	85.27	1.05	0.72	0.84
4	E	1018	967	310.27	0.84	0.75	0.86
4	E	1018	967	310.27	0.84	0.75	0.86
5	E	877	834	15.45	11.86	0.75	0.86
5	E	877	834	15.45	11.86	0.75	0.86
6	E	308	292	15.66	0.89	0.75	0.86
6	E	308	292	15.66	0.89	0.75	0.86

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.328
H2	0.000	0.000	1.781
F3	0.000	1.485	-0.236
F4	1.286	-0.743	-0.236
F5	-1.286	-0.743	-0.236

	Si1	H2	F3	F4	F5
Si1		1.4532	1.5884	1.5884	1.5884
H2	1.4532		2.5044	2.5044	2.5044
F3	1.5884	2.5044		2.5723	2.5723
F4	1.5884	2.5044	2.5723		2.5723
F5	1.5884	2.5044	2.5723	2.5723

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
H2	Si1	F3	110.771	H2	Si1	F4	110.771
H2	Si1	F5	110.771	F3	Si1	F4	108.141
F3	Si1	F5	108.141	F4	Si1	F5	108.141

All results from a given calculation for SiHF₃ (trifluorosilane)

using model chemistry: MP2/6-311G*

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiHF3 (trifluorosilane)

using model chemistry: MP2/6-311G*

States and conformations

All results from a given calculation for SiHF₃ (trifluorosilane)