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	hartrees
Energy at 0K	-588.816729
Energy at 298.15K
HF Energy	-588.110688
Nuclear repulsion energy	187.080485

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2387	2286	68.44
2	A₁	858	822	94.13
3	A₁	424	406	87.51
4	E	1019	975	297.93
5	E	867	830	19.80
4	E	1019	975	297.93
5	E	867	830	19.79
6	E	309	295	16.13
6	E	309	295	16.13

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.328
H2	0.000	0.000	1.787
F3	0.000	1.481	-0.236
F4	1.283	-0.741	-0.236
F5	-1.283	-0.741	-0.236

	Si1	H2	F3	F4	F5
Si1		1.4585	1.5852	1.5852	1.5852
H2	1.4585		2.5074	2.5074	2.5074
F3	1.5852	2.5074		2.5656	2.5656
F4	1.5852	2.5074	2.5656		2.5656
F5	1.5852	2.5074	2.5656	2.5656

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
H2	Si1	F3	110.865	H2	Si1	F4	110.865
H2	Si1	F5	110.865	F3	Si1	F4	108.042
F3	Si1	F5	108.042	F4	Si1	F5	108.042

All results from a given calculation for SiHF₃ (trifluorosilane)

using model chemistry: QCISD/6-311G*

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiHF3 (trifluorosilane)

using model chemistry: QCISD/6-311G*

States and conformations

All results from a given calculation for SiHF₃ (trifluorosilane)