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	hartrees
Energy at 0K	-588.808999
Energy at 298.15K
HF Energy	-588.110896
Nuclear repulsion energy	187.370339

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2396	2288	67.45
2	A₁	866	827	98.27
3	A₁	428	409	90.95
4	E	1025	979	306.29
4	E	1025	979	306.29
5	E	872	833	21.01
5	E	872	833	21.01
6	E	312	298	16.60
6	E	312	298	16.60

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.328
H2	0.000	0.000	1.786
F3	0.000	1.479	-0.236
F4	1.281	-0.739	-0.236
F5	-1.281	-0.739	-0.236

	Si1	H2	F3	F4	F5
Si1		1.4575	1.5828	1.5828	1.5828
H2	1.4575		2.5048	2.5048	2.5048
F3	1.5828	2.5048		2.5614	2.5614
F4	1.5828	2.5048	2.5614		2.5614
F5	1.5828	2.5048	2.5614	2.5614

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
H2	Si1	F3	110.882	H2	Si1	F4	110.882
H2	Si1	F5	110.882	F3	Si1	F4	108.025
F3	Si1	F5	108.025	F4	Si1	F5	108.024

All results from a given calculation for SiHF₃ (trifluorosilane)

using model chemistry: CCD/6-311G*

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiHF3 (trifluorosilane)

using model chemistry: CCD/6-311G*

States and conformations

All results from a given calculation for SiHF₃ (trifluorosilane)