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	hartrees
Energy at 0K	-390.499046
Energy at 298.15K
HF Energy	-390.192932
Nuclear repulsion energy	62.661500

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2258	2153	31.07
2	A₁	1032	984	283.53
3	A₁	880	839	54.12
4	E	2262	2157	147.58
5	E	2262	2157	147.58
6	E	967	922	113.38
7	E	967	922	113.38
8	E	751	716	70.50
9	E	751	716	70.50

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.504
F2	0.000	0.000	-1.110
H3	0.000	1.404	0.976
H4	-1.216	-0.702	0.976
H5	1.216	-0.702	0.976

	Si1	F2	H3	H4	H5
Si1		1.6137	1.4812	1.4812	1.4812
F2	1.6137		2.5140	2.5140	2.5140
H3	1.4812	2.5140		2.4319	2.4319
H4	1.4812	2.5140	2.4319		2.4319
H5	1.4812	2.5140	2.4319	2.4319

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.570	F2	Si1	H4	108.570
F2	Si1	H5	108.570	H3	Si1	H4	110.357
H3	Si1	H5	110.357	H4	Si1	H5	110.357

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: CCSD/6-311G*

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: CCSD/6-311G*

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)