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	hartrees
Energy at 0K	-390.505382
Energy at 298.15K
HF Energy	-390.192819
Nuclear repulsion energy	62.579783

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)
1	A₁	2246	2162
2	A₁	1029	990
3	A₁	874	841
4	E	2251	2167
5	E	2251	2167
6	E	962	926
7	E	962	926
8	E	747	719
9	E	747	719

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.505
F2	0.000	0.000	-1.111
H3	0.000	1.405	0.978
H4	-1.217	-0.702	0.978
H5	1.217	-0.702	0.978

	Si1	F2	H3	H4	H5
Si1		1.6159	1.4826	1.4826	1.4826
F2	1.6159		2.5180	2.5180	2.5180
H3	1.4826	2.5180		2.4334	2.4334
H4	1.4826	2.5180	2.4334		2.4334
H5	1.4826	2.5180	2.4334	2.4334

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.635	F2	Si1	H4	108.635
F2	Si1	H5	108.635	H3	Si1	H4	110.295
H3	Si1	H5	110.295	H4	Si1	H5	110.295

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: CCSD(T)/6-311G*

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: CCSD(T)/6-311G*

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)