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	hartrees
Energy at 0K	-391.144123
Energy at 298.15K
HF Energy	-391.144123
Nuclear repulsion energy	62.496051

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2253	2169	32.69
2	A₁	1020	982	261.14
3	A₁	859	827	49.53
4	E	2258	2174	152.73
5	E	2258	2174	152.76
6	E	953	917	104.83
7	E	953	917	104.83
8	E	729	702	63.25
9	E	729	702	63.25

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.505
F2	0.000	0.000	-1.113
H3	0.000	1.405	0.981
H4	-1.216	-0.702	0.981
H5	1.216	-0.702	0.981

	Si1	F2	H3	H4	H5
Si1		1.6187	1.4829	1.4829	1.4829
F2	1.6187		2.5218	2.5218	2.5218
H3	1.4829	2.5218		2.4328	2.4328
H4	1.4829	2.5218	2.4328		2.4328
H5	1.4829	2.5218	2.4328	2.4328

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.708	F2	Si1	H4	108.708
F2	Si1	H5	108.708	H3	Si1	H4	110.223
H3	Si1	H5	110.223	H4	Si1	H5	110.223

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: B3PW91/6-311G*

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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Number	Element	Mulliken
1	Si	0.699
2	F	-0.431
3	H	-0.089
4	H	-0.089
5	H	-0.089

	x	y	z	Total
	0.000	0.000	1.544	1.544
CHELPG
AIM
ESP

<r²>	36.092
(<r²>)^1/2	6.008

All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: B3PW91/6-311G*

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)